
Solution
High Precision Linear Motor Drive Solution|Enabling LCD Panel Manufacturing Yield to Surpass 99.5%
Linear motor-driven LCD panel handling/cutting/dispensing equipment working panorama + close-up of motor module
Linear Motor Core Value Matrix
1. Nanoscale positioning accuracy
Repeat positioning accuracy of ±0.5μm (to meet the needs of OLED vapor deposition process)
Grating scale closed-loop control, eliminating backlash/crawling phenomenon
2. Ultra-high-speed dynamic response
Peak acceleration up to 5G, response time <10ms
Supports S-shaped speed curve planning, vibration amplitude reduced by 70%.
3. Zero contact and maintenance free
Mechanical frictionless structure, life time >100,000 hours
Cleanroom compatible (ISO Class 3 certified, no oil emissions)
Four application scenarios of linear motors in LCD manufacturing
Scenario 1: Precision handling of glass substrates
Maximum load 1200kg, speed 2m/s
Magnetic levitation technology realizes ±1mm levitation height control.
Scene 2: Panel cutting and positioning system
0.1μm micro-step control, 3 times longer life of cutting wheel.
Real-time compensation of thermal deformation with laser interferometer
Scene 3: High-speed lamination of optical film
300mm×300mm stroke repeatability ±1μm
Dual-drive synchronized control, deflection angle <0.001°.
Scene 4: Defect detection scanning
600 times/min high frequency reciprocating motion
Low cogging force design (thrust fluctuation <0.5%)
Comparison of technical parameters with industry standards
Index | Conventional lead screw | XX linear motor | Industry demand |
Positioning accuracy | ±5μm | ±0.5μm | ≤2μm |
Maximum speed | 1.5m/s | 5m/s | ≥3m/s |
Acceleration | 1G | 5G | ≥3G |
Maintenance cycle | 3 months | maintenance-free | 6 months |
Successful Cases
Upgrade data of G10.5 production line of a global Top5 panel factory:
Application equipment: Array process exposure machine positioning system
Modification effect:
▶︎ Alignment accuracy increased from ±3μm to ±0.8μm.
▶︎ Overall equipment efficiency (OEE) increased from 82% to 95%.
▶︎ Reduced annual maintenance cost by $520,000/line.

Industry exclusive service system
1.Customized development:
Provide modularized design according to equipment size/load/precision requirements
Support single-axis/multi-axis gantry architecture program
2.Localization support:
24/7 remote diagnosis system
Shanghai/Shenzhen bonded warehouse spare parts 3 hours speedy delivery
3.In-depth integration service:
Pre-adaptation with ACS/Beckhoff and other mainstream controllers
Provide a full set of mechanical simulation report
Translated with DeepL.com (free version)
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