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Solution

FP Gantry (Fixed Portal Gantry)

LED wick testing platform ZWDM-G5

Suitable for large panel lamp wick inspection industry

 

Product Features

Precision linear guide

Coreless motor

High speed stability

Taking into account large travel, high precision, heavy load

Large detection format

Can customize a variety of models from small generation to large generation

 

Structural characteristics

Gantry structure, high stability

Low abbe error

The platform has compact structure and strong driving ability

 

Customization   
Can be configured according to customer needs, travel, load,

Special structures are evaluated and customized

 

Product parameter

Platform type

ZWDM-G5

Axial direction X0 axis Y0 axis Y1 axis ZO axis Z1 axis
Load 30 kg 12 Kg 40 kg 30 kg 12 kg
Positioning accuracy +/- (3+L/250) um +/- 15 um +/- 10 um 12 mmMinimum 12 mmMinimum
Journey 2050 1400mm 194mm - -
Straight axis length 3140 mm mm mm - -
Length of slide 890 mm 230 mm mm - -
Resolution 5 nm or better 0.1um or better 0.1um or better 0.2 um 0.2 um
Acceleration 0.5G(Average)@66.7% Jerk 0.5G (Average)@66.7% Jerk 0.25G (Average)@66.7% Jerk 50 mm/sec^2 50 mm/sec^2
Speed 1000 mm/s(Max) 1000 mm/s (Max) 500 mm/s (Max) - -
Velocity fluctuation 0.2%Max@Velocity=400mm/s - - - -
Repeated positioning accuracy +/-1um +/-1 um +/-1 um +/-1um +/- 0.1 um
Vertical straightness +/-15 um +/-10 um +/- 12 um over fullrange - -
Horizontal straightness +/- 2 um over200mm+/- 15 um over full range +/-10 um +/- 10 um - -
Setting time 200 msec @ 0.2ump-p 200 msec @0.2ump-p 200 msec @0.2ump-p - -
XOY0 is orthogonal 20um p-p   - -

 

Overall dimension

 

PCB Board LDI Exposure Platform
zwsw-k1195-x900-2y1350-z20

 

Product characteristics

High precision, high stability direct drive structure design

Non-contact high precision grating ruler

Adopt high precision linear guide rail

Travel, size and cable can be customized according to customer requirements

 

Structural characteristics

Seven axis LDI exposure machine, all using coreless linear motor

Direct drive control, no grooving effect, smooth operation at low speed (speed Small degree fluctuation)

At the same time equipped with non-contact high-precision grating ruler, with very

Excellent dynamic performance, positioning accuracy and repeated positioning accuracy

High precision grating position feedback is selected for seven-axis LDI exposure machine

The full stroke repeatability is less than ±1.5um

Positioning accuracy is less than ± 2.5um

Generally work with high-precision lifting axis (Z axis)

 

Customization

Can be configured according to customer needs, travel, load,

Special structures are evaluated and customized

 

Product parameter

Platform type

ZWSW-K1195-X900-2Y1350-Z20

Shafting X-axis Y1/Y2 axis Z1/Z2 axis K-axis
Journey 900 mm 1350 mm 20 mm 1195 mm
Load 120 kg ≥55KG Z-axis weight ≥ 55KG 3(side hanging)
Encoder resolution 0.1um 0.1um 20um 0.1 um
Minimum step 0.5 um 0.5 um   0.5 um
Linear positioning accuracy ±2.5 um +2.5 um ±15 um ±2.5 um
Two-way repeatability ±1.5um ±1.5 um ±8 um ±1.5 um
Horizontal straightness ±8 um ±5 um ±5 um ±10 um
Vertical straightness ±12 um ±12 um ±5 um ±10 um
Yaw 5 arc sec 5 arc sec 20 arc sec ±15 um
Pitch 10 arc sec 10 arc sec For points 300mm away from the center in the X and Y directions, the maximum error in the Z direction is ±30um during the 20mm movement of the Z axis -
Roll 10 arc sec - - ±10 um
Yaw ±2.5 arc sec/50mm - - -
Pitch ±5 arc sec/50mm - - -
Y1Y2, X perpendicularity 4.1 arc sec(converted to dial gauge runout 10um) - - -
Y1, Y2 parallelism - ±3μm - -
Maximum speed 500 500 mm/s 15 mm/s 500 mm/s
Maximum acceleration 5000 mm/s2  
±0.5um Setting time of the position threshold <0.1/50mm<0.1/700mm500mm/s0.5G acceleration,50000 acceleration, under load <0.1S/1mm<0.1S/500mm - <0.1/50mm<0.1/700mm500mm/s,0.5G acceleration,50000 acceleration, hanging load
Velocity stability - <1%(50-500mm/s) - -
K-axis Y-axis perpendicularity - - - 4.1 arc sec(converted to dial gauge runout 10um)

 

Overall dimension