XY air float platform
· The air float platform has extremely high accuracy and stability · The air floating platform has excellent load carrying capacity and sports performance · The maintenance cost of the air floating platform is low because the coefficient of friction is small and does not cause wear and tear · High straightness and flatness · Due to its product characteristics, the air floating platform has certain requirements for the use environment and needs to be used in a clean room · Need to use clean, dry air supply
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Air floating platform and its principle
Air floating platform is a kind of suspension system with gas as the medium, using the gas buoyancy generated by gas flow to support and suspend objects, to achieve non-contact suspension effect.
The principle is to inject compressed air or nitrogen on the plane interface, generate gas buoyancy to support the suspended object through gas flow and bubble formation, form a layer of gas suspension layer, and realize the suspension of the object, so as to achieve high-precision processing, lithography and detection purposes. -
Shafting X-axis Y-axis Journey 900 mm 1350 mm XX straightness 120 kg ≥ 55KG Z-axis weight Linearity of YY 0.1 um 0.1 um Positioning accuracy 5 arc sec 5 arc sec Repeated positioning accuracy 10 arc sec 10 arc sec yaw ±2.5 arc sec/50mm / pitch ±5 arc sec/50mm / -
• Silicon carbide ceramic air float guide rail, super performance accuracy
• Speed 1m/s, acceleration 4g, fast setting time
• Y-axis double drive double gantry structure, strong bearing capacity
• Optional grating or laser interferometer position feedback
• Can be customized according to customer requirements configuration, travel, load, special structure, etc
Industrial Lineart Motion Solution
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