BZDM-X340-Y420-RB0.5
Keywords:
The platform is a precision motion table with a hollow structure, large size through hole, high dynamic performance to meet the wafer placement and detection applications, but also suitable for CCD imaging, LED packaging detection of other high-end manufacturing industries Using laminated compact hollow shape structure The operating point position is lowered and the grating feedback position is close to the sheet The surface, which is crucial in wafer inspection, is double-driven straight on the Y-axis Line motor drive Delivers high thrust, 1m/s speed and accurate positioning
Keywords:
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